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| ÐÍ  Ì–(h¨¤o) | iLX150-2S | iLX250-2S | iLX300-2S | iLX400-2S | 
| ÐгÌ(XYZ)mm | 150*100*150 | 250*150*150 | 300*200*150 | 400*200*150 | 
| ¹â–Å·Ö±æÂÊum | 0.5 | 0.5 | 0.5 | 0.5 | 
| ÖØÍ(f¨´)¶¨Î»um | 2 | 2 | 2 | 2 | 
| ¾€ÐÔ¾«¶Èum | ±(3+L/150) | ±(3+L/150) | ±(3+L/150) | ±(4+L/150) | 
| ƽÅ_(t¨¢i)ÝdÖØkgs | 20 | 30 | 30 | 30 | 
| ™C(j¨©)Æ÷×ÔÖØ kgs | 130 | 150 | 160 | 190 | 
| ƽÅ_(t¨¢i)ß\(y¨´n)„Ó(d¨°ng) mm/s | 10 | 10 | 10 | 10 | 
| ½»Ø›ÖÜÆÚ wks | 2-3 | 2-3 | 3-4 | 4-5 |